Nanostructuring of materials is a task at the heart of many modern disciplines in mechanical engineering, as well as optics, electronics, and the life sciences. This book includes an introduction to the relevant nonlinear optical processes associated with very short laser pulses for the generation of structures far below the classical optical diffraction limit of about 200 nanometers as well as coverage of state-of-the-art technical and biomedical applications. These applications include silicon and glass wafer processing, production of nanowires, laser transfection and cell reprogramming, optical cleaning, surface treatments of implants, nanowires, 3D nanoprinting, STED lithography, friction modification, and integrated optics.

The book highlights also the use of modern femtosecond laser microscopes and nanoscopes as novel nanoprocessing tools.

Contents

• Foreword 1
• Foreword 2
• Authors
• Tutorial: Laser in material nanoprocessing
  A Ostendorf and K König.
  • 1. Introduction
  • 2. Laser-material interactions
  • 3. UV laser nanoprocessing
  • 4. Femtosecond laser technology
  • 5. Multiphoton effects
  • 6. Laser-matter interactions for ultrashort laser pulses
  • 7. Biomedical applications of nanoprocessing
  • 8. Technical applications
  • 9. Summary and outlook
  • References
• Technical applications
  • 1. Nanoprocessing using near-infrared sub-15 femtosecond laser microscopes
    K König, H Seidel, M Afshar, M Klötzer, D Feili, and M Straub.
    • 1.1. Laser microscopes – universal tools for imaging, manipulation, material characterization, and micro- and nanoprocessing
    • 1.2. Sub-20 femtosecond laser scanning microscopes
    • 1.3. Two-photon lithography with broadband pulses
    • 1.4. Generation of ITO-nanowires and nanoresonators
    • 1.5. Generation of sub-wavelength LIPSS
    • 1.6. On-chip laser nanoprocessing
    • 1.7. Femtosecond laser-generated liquid crystal filters
    • 1.8. Micro/nanojets for electrospray ionization
    • 1.9. Outlook
    • References
  • 2. Nanophotonic applications of fs-laser radiation induced nanostructures and their theoretical description
    M Reininghaus, D Ivanov, TWW Maß, S Eckert, L Juschkin, ME Garcia, T Taubner, and R Poprawe.
    • 2.1. Introduction
    • 2.2. Theoretical description of nanostructure generation with an ultrashort laser pulse
    • 2.3. Tailored resonances of upright gold nanoantennas
    • 2.4. Plasmonic excitation of ripple structures generated by fs-laser radiation
    • 2.5. Conclusion
    • References
  • 3. Temporally shaped femtosecond laser pulses for creation of functional sub-100 nm structures in dielectrics
    N Götte, T Kusserow, T Winkler, C Sarpe, L Englert, D Otto, T Meinl, Y Khan, B Zielinski, A Senftleben, M Wollenhaupt, H Hillmer, and T Baumert.
    • 3.1. Application and processing of dielectric materials for optical devices
    • 3.2. Laser material processing of dielectrics via short and ultrashort laser pulses
    • 3.3. Experimental results in dielectrics
    • 3.4. Fabrication of a photonic crystal based filter device by temporally shaped fs-laser pulses
    • 3.5. Characterization of ablation channels by focused ion beam milling
    • 3.6. Summary
    • References
  • 4. Design and fabrication of near- to far-field transformers by sub-100 nm two-photon polymerization
    C Reinhardt, V Ferreras Paz, L Zheng, K Kurselis, T Birr, U Zywietz, B Chichkov, K Frenner, and W Osten.
    • 4.1. Introduction
    • 4.2. Fabrication approaches for near- to far-field transformation optics
    • 4.3. Fourier scatterometry on gratings with designed near-field structures
    • 4.4. Experimental results
    • 4.5. Conclusions
    • Acknowledgments
    • References
  • 5. Ultrashort pulse-induced periodic nanostructures in bulk glass: from fundamentals to applications in high-resolution microscopy
    F Zimmermann, S Richter, R Buschlinger, S Shukla, R Heintzmann, U Peschel, and S Nolte.
    • 5.1. Introduction
    • 5.2. Experimental analysis of nanograting formation and evolution
    • 5.3. Theoretical aspects of nanograting formation in the bulk of transparent materials
    • 5.4. Application of nanograting-based devices for high resolution microscopy
    • 5.5. Summary
    • References
  • 6. Nonlinear processing and multiphoton ablation of self-assembled monolayers for application as ultrathin resists and in biochemical sensors
    N Hartmann, S Franzka, A Schröter, A Aumann, and A Ostendorf.
    • 6.1. Preface
    • 6.2. Introduction
    • 6.3. Femtosecond laser patterning of self-assembled monolayers
    • 6.4. Summary
    • Acknowledgments
    • References
  • 7. Femtosecond laser-induced surface nanostructures for tribological applications
    J Bonse, S Höhm, M Hartelt, D Spaltmann, S Pentzien, R Koter, S Marschner, A Rosenfeld, and J Krüger.
    • 7.1. Introduction
    • 7.2. Experimental details
    • 7.3. Tribological performance of LIPSS
    • 7.4. Summary
    • Acknowlegments
    • References
• Biomedical applications
  • 1. Optical reprogramming and optical characterization of cells using femtosecond lasers
    A Uchugonova, HG Breunig, C Augspurger, M Monaghan, K Schenke-Layland, and K König.
    • 1.1. Stem cells and iPS cells
    • 1.2. 5D two-photon imaging and nanoprocessing microscopes
    • 1.3. Femtosecond laser transfection
    • 1.4. Optical reprogramming of murine cells
    • 1.5. Optical reprogramming of human cells
    • 1.6. Fluorescence lifetime imaging
    • 1.7. Optical cleaning
    • 1.8. Conclusion and outlook
    • References
  • 2. Nanoscale biofunctionalization of polymer surfaces by laser treatment for controlled cellular differentiation
    M Steger, G Abagnale, E Bremus-Köbberling, W Wagner, and A Gillner.
    • 2.1. Nanostructuring and mesenchymal stem cells
    • 2.2. Nanostructuring of materials
    • 2.3. Impact of laser-ablated nanogrooves on cell biology
    • 2.4. Conclusion and outlook
    • References
  • 3. Laser-generated bioactive hydrogels as ion-release systems for burn wound therapy
    V Coger, N Million, P Wilke, A Pich, PM Vogt, K Reimers, and S Barcikowski.
    • 3.1. Introduction
    • 3.2. Results and discussion
    • 3.3. Conclusion
    • References
  • 4. Nanoparticle-loaded bioactive hydrogels
    K Wallat, MM Gepp, S Berger, R Le Harzic, JC Neubauer, H Zimmermann, F Stracke, and M Epple.
    • 4.1. Introduction
    • 4.2. Material and methods
    • 4.3. Results
    • 4.4. Conclusions
    • Acknowledgments
    • References
  • 5. Two-photon polymerization of inorganic-organic polymers for biomedical and microoptical applications
    F Burmeister, S Steenhusen, R Houbertz, TS Asche, J Nickel, S Nolte, N Tucher, P Josten, K Obel, H Wolter, S Fessel, AM Schneider, K-H Gärtner, C Beck, P Behrens, A Tünnermann, and H Walles.
    • 5.1. Introduction
    • 5.2. Hybrid optics
    • 5.3. Inorganic-organic polymers
    • 5.4. Applications
    • 5.5. Conclusion
    • 5.6. Supplementary material
    • References
  • 6. Optical antennae for near-field induced nonlinear photochemical reactions of photolabile azo- and amine groups
    P Reichenbach, U Georgi, U Oertel, T Kämpfe, B Nitzsche, B Voit, and LM Eng.
    • 6.1. Introduction
    • 6.2. Experimental design
    • 6.3. Photochemical experiments using a copolymer carrying azobenzene side groups
    • 6.4. Photochemical experiment with azosulfonate-carrying copolymers
    • 6.5. Photochemical experiment with copolymers carrying protected amines
    • 6.6. Conclusions
    • Acknowledgments
    • References
  • 7. Optical trap assisted sub diffraction limited laser structuring
    I Alexeev, U Quentin, K-H Leitz, J Strauß, M Baum, F Stelzle, and M Schmidt.
    • 7.1. Introduction
    • 7.2. Optical trapping
    • 7.3. Microsphere focusing in liquid media – numerical simulations
    • 7.4. Experimental procedure
    • 7.5. Nanostructuring results
    • 7.6. Conclusion
    • References
  • 8. STED lithography and protein nanoanchors
    TA Klar.
    • 8.1. Introduction
    • 8.2. STED microscopy
    • 8.3. STED lithography
    • 8.4. STED related lithography
    • 8.5. Resolution in microscopy and lithography
    • 8.6. Nanoanchors for single antibody display
    • 8.7. Conclusion/Further directions
    • Acknowledgments
    • References

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